| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small-sized piezoelectric vibrator for a piezoelectric vibration gyro having excellent productivity, and its manufacturing method, by simplifying a connection process and a positioning process between an electrode and a conductor at the polarization processing time. <P>SOLUTION: As for one electrode pair, one electrode is used as a driving electrode 2, and the other is used as grounding electrodes 5, 6, 7, and as for the other electrode pair, one electrode is used as detection electrodes 3, 4 and the other is used as the grounding electrodes 5, 6, 7, and a detection electrode pair is arranged symmetrically with respect to a vibration surface of bending vibration excited by the driving electrode pair, to thereby manufacture this piezoelectric vibrator for the piezoelectric vibration gyro. The grounding electrodes 5, 6, 7 are used as one electrode as a common grounding electrode 8. The driving electrode 2 and the plurality of detection electrodes 3, 4 which are essentially independent, are connected together as one electrode by a connection electrode 9, and subjected to polarization processing after connection, and the connection electrode 9 is removed after the polarization processing to thereby separate the driving electrode 2 from the detection electrodes 3, 4, which are essentially independent. <P>COPYRIGHT: (C)2007,JPO&INPIT |
