SURFACE TREATMENT METHOD, PLASMA DISCHARGE TREATMENT APPARATUS, ANTI-GLARE FILM AND ANTI-GLARE LOW-REFLECTION FILM

摘要

PROBLEM TO BE SOLVED: To provide a surface treatment method for forming an anti-glare layer, which requires a short treatment time and no complex step, a plasma discharge treatment apparatus, and an anti-glare film and an anti-glare low-reflection film formed using the surface treatment method and the plasma discharge treatment apparatus.

SOLUTION: In the surface treatment method, an electric field with a non-uniform intensity distribution is generated in a region between the opposed electrodes under atmospheric pressure or under a pressure near atmospheric pressure, a mixed gas of a nitrogen gas and a reactive gas is converted into a non-uniform plasma state by the electric field with the non-uniform intensity distribution in the region between the opposed electrodes, and the surface of a substrate to be treated is subjected to the mixed gas in the plasma state to form irregularities and gaps on the surface of the subject to be treated.

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