| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus of correcting a defect improved so that various defect can be corrected efficiently. SOLUTION: The apparatus of correcting the defect includes a defect detection/analyzer 1 which detects the defect in the manufacturing step of a semiconductor device or a liquid crystal display unit, a storage device 2 which analyzes, collects and stores data of the position/type/size/constitution component of the defect, data about this memorized defect, a defect automatic classification/abstraction processor 3 which extracts the defect which compares a circuitry design layout database 4 and a defect knowledge database 5 and causes mismatching electrically, a defective correction method selecting processor 6 which selects a coping method extracted from the defective correction method knowledge database 7, for correcting the defect which causes mismatching, and a defective correctional device 8 to remove or restore the defect by the selected defective correction method. COPYRIGHT: (C)2007,JPO&INPIT
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