| 摘要 |
PROBLEM TO BE SOLVED: To independently hold a plurality of workpieces. SOLUTION: A sucking and holding apparatus 30 is provided with a plurality of suction parts 121, 122 for sucking the plurality of the workpieces in each workpiece, a table 120 having a plurality of exhaust routes independently connected to respective suction parts 121, 122, and a rotational drive 130 for rotating the table part 120. A plurality of cylindrical exhaust pipes 161, 162 having respectively different diameters are separately arranged on a concentric circle around the rotary shaft of the table 120 in a through-hole 131 penetrated into the rotational drive 130, to form an independent route between the inside of the cylindrical exhaust pipe 162 having a large diameter and the outside of the cylindrical exhaust pipe 161 having a small diameter; the independent route is divided into a plurality of exhaust routes; and the plurality of exhaust routes divided by respective cylindrical exhaust pipes 161, 162 are connected to respective exhaust routes of the table 120, to independently connect respective suction parts 121, 122 to external suction means. COPYRIGHT: (C)2007,JPO&INPIT
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