THIN FILM MAGNETIC HEAD AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a thin film magnetic head which has a significantly narrow track width without ATE problems and excellent in O/W properties with fast switching speed. SOLUTION: A lower pole film 212 of a writing element 2 is formed all over one surface of a lower yoke film 211 inside a trench provided on an inorganic insulation film 271. A gap film 24 and an upper pole film 221 are formed inside the trench on the lower pole film 212. It is preferable that the trench has a deposited film of inorganic material 28 on the inner walls facing the side faces of the above lower pole film 212, gap film 24 and upper pole film 221. COPYRIGHT: (C)2007,JPO&INPIT