| 摘要 |
PROBLEM TO BE SOLVED: To realize a density data conversion method and a device capable of acquiring equivalent thickness image density data having excellent linearity to the work thickness, and to provide an X-ray inspection system having high measuring accuracy of a volume, a mass or the like. SOLUTION: In this method for applying conversion processing from radiogram density data P corresponding to an X-ray transmission amount of the work W to equivalent thickness image density data Q(P) corresponding the thickness of the work W, a density value P<SB>0</SB>of a background in the radiogram, a representative density P<SB>1</SB>of a foreground in the radiogram, and the maximum density Qmax of the equivalent thickness image are set respectively, and the conversion processing is performed by the following formula [1]: Q(P)=[äln(P<SB>0</SB>)-ln(p)}/äln(P<SB>0</SB>)-ln(p<SB>1</SB>)}]<SP>γ</SP>×Qmax...[1], and a correction index valueγin the formula [1] is adjusted so as to secure linearity of the density data Q(P) of the equivalent thickness image. COPYRIGHT: (C)2007,JPO&INPIT
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