| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of performing zero-point correction, while inspecting a work, and reducing dispersion of accuracy caused by temperature drift or the like. SOLUTION: In this X-ray inspection device for measuring the volume of the work based on a radiogram, its processing unit 6 includes a data conversion processing part 62 for applying conversion processing from radiogram density data in each transmission domain to density data of an equivalent thickness image in the transmission domain, and a volume measuring part 63 for measuring the volume of the work in the plurality of transmission domains based on the density data of the equivalent thickness image, and a zero-point correction part 61 for processing data equivalent to an X-ray transmission amount and performing zero-point correction of the radiogram density data so that the equivalent thickness of a background when irradiating the work with the X-ray becomes zero, and the zero-point correction part 61 executes zero-point correction corresponding to a period for measuring the volume of the work. COPYRIGHT: (C)2007,JPO&INPIT
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