发明名称 O-RINGLESS TANDEM THROTTLE VALVE FOR A PLASMA REACTOR CHAMBER
摘要 <p>A valve system having high maximum gas flow rate and fine control of gas flow rate, includes a valve housing for blocking gas flow through a gas flow path, a large area opening through said housing having a first arcuate side wall and a small area opening through said housing having a second arcuate side wall, and respective large area and small area rotatable valve flaps in said large area and small area openings, respectively, and having arcuate edges congruent with said first and second arcuate side walls, respectively and defining therebetween respective first and second valve gaps. The first and second valve gaps are sufficiently small to block flow of a gas on one side of said valve housing up to a predetermined pressure limit, thereby obviating any need for 0- rings.</p>
申请公布号 WO2006116511(A2) 申请公布日期 2006.11.02
申请号 WO2006US15833 申请日期 2006.04.26
申请人 APPLIED MATERIALS, INC. 发明人 HANAWA, HIROJI
分类号 H01L21/306 主分类号 H01L21/306
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