METHOD FOR DECREASING CHEMICAL DIFFUSION IN PARYLENE AND TRAPPING AT PARYLENE-TO-PARYLENE INTERFACES
摘要
<p>Systems and methods for improving the adherence of poorly-adherent parylene-to-parylene films or layers and/or altering the water and chemical permeability of the parylene layers. A device having two or more parylene layers is heated in a reduced pressure treatment chamber at a temperature above the deposition temperature of the parylene (e.g., from about room temperature to several hundreds of degrees Celsius) for an extended period of time (e.g., a few hours up to several days). The methods of the present invention have been shown to convert poorly-adherent and/or water-permeable films to optimally-adherent and/or relatively water-impermeable films.</p>
申请公布号
WO2006116326(A2)
申请公布日期
2006.11.02
申请号
WO2006US15500
申请日期
2006.04.21
申请人
CALIFORNIA INSTITUTE OF TECHNOLOGY;TAI, YU-CHONG;RODGER, DAMIEN C.;LI, WEN;TOOKER, ANGELA
发明人
TAI, YU-CHONG;RODGER, DAMIEN C.;LI, WEN;TOOKER, ANGELA