| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new device and a new method for inspecting foreign matter, with which highly accurate foreign matter inspection is realized, an exposing device, and a method for manufacturing the device. <P>SOLUTION: The device for inspecting the presence or absence of the foreign matter on a face to be inspected of an object is equipped with: a light irradiation means with which the face to be inspected is irradiated with inspection light; a light receiving means to receive the inspection light scattered by the foreign matter on the face to be inspected; and a light shielding means to restrict the irradiation range of the inspection light with the light irradiation means within the face to be inspected. <P>COPYRIGHT: (C)2007,JPO&INPIT |
