| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems wherein, though gas is required to be supplied in the same flow rate to sensor cells having each different adsorption characteristic in order to detect each kind and concentration of a plurality of gas components, if the sensor cells are arranged in a serial system, a time difference is generated in each sensor response, and the sensor response of a sensor cell on the downstream side is influenced by the adsorption/discharge characteristic of a sensor cell on the upstream side. SOLUTION: A pump for supplying gas G to the plurality of sensor cells 3 having respectively a constitution wherein a piezoelectric oscillator provided with a gas adsorption film on the surface is arranged, is constituted: of a rotating member (rotator) 13 rotating when a driving force is applied thereto; a plurality of movable members (pressure rollers) 16 moving sequentially with the rotating member 13; and a plurality of pump chambers 5 provided respectively in a plurality of measuring object gas supply tubes 5. Since each volume of the plurality of pump chambers is increased/decreased synchronously by movement of the movable members 11, the measuring object gas G is supplied synchronously in the same flow rate to each sensor cell 3 arranged in parallel. COPYRIGHT: (C)2007,JPO&INPIT
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