| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the use of positioning activity during test, while making it possible to inspect defects at marginal part of glass plate with high precision. SOLUTION: The defect detection system includes a conveyance mechanism conveying glass plates to a marginal part inspecting section, established on a conveyer, through a conveyance attitude detecting section, a conveyance attitude detection device, prepared to the conveyance attitude detecting section, which detects conveyance attitude of glass plate conveyed to the marginal part inspecting section, using an imager 106 for attitude detection and a light source 104, and a marginal part inspecting device, prepared to the marginal part inspecting section, where by moving a camera assembly 210 incorporating an imager 212 for defect detection and a light source 214 over the whole perimeter of glass plates along the marginal part of the glass plate, the defects at the marginal part of the glass plates are detected based on imager information of the marginal part of glass plate acquired by the imager 212 during that time, while moving trajectory of the camera assembly 210 is determined based on conveyance attitude information of glass plates derived from the aforementioned conveyance attitude detection device. COPYRIGHT: (C)2007,JPO&INPIT
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