发明名称 Conductive niobium oxide gate MOSFET
摘要 MOSFET gate structures are provided comprising a niobium monoxide gate, overlying a gate dielectric. The niobium monoxide gate may have a low work function suitable for use as an NMOS gate.
申请公布号 US2006244028(A1) 申请公布日期 2006.11.02
申请号 US20060479045 申请日期 2006.06.30
申请人 SHARP LABORATORIES OF AMERICA, INC. 发明人 GAO WEI;ONO YOSHI
分类号 H01L21/28;H01L29/94;H01L21/285;H01L21/336;H01L29/423;H01L29/49;H01L29/51;H01L29/76;H01L29/78 主分类号 H01L21/28
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