发明名称 Method for improved optical design using deterministically defined surfaces
摘要 An embodiment of the present invention provides a method for designing optical surfaces. According to this method, m optical surfaces are defined, such that each successive optical surface receives a wavefront from a previous optical surface. Wavefront aberrations caused by each optical surface are calculated. The changes at each respective optical surface required to compensate for the wavefront aberration caused by the respective optical surfaces are then calculated. A desired optical profile for each of the m optical surfaces is determined in accordance with the calculated changes to each respective optical surface.
申请公布号 US2006245094(A1) 申请公布日期 2006.11.02
申请号 US20050117490 申请日期 2005.04.29
申请人 ASML HOLDING N.V. 发明人 HARNED NORA-JEAN;GONTIN RICHARD A.;HARNED ROBERT D.;LATYPOV AZAT M.;SMIRNOV STANISLAV Y.
分类号 G02B7/00 主分类号 G02B7/00
代理机构 代理人
主权项
地址