Process of manufacturing nozzle plate for ink-jet print head

摘要

A process of manufacturing a nozzle plate (110) for an inkjet print head (101), said process comprising:
a deforming step of plastically deforming portions of said substrate (111) in which said nozzles holes (113) are to be formed, in a direction away from said inside surface (111b) toward said outside surface (111a), such that a recess (121b) and a protrusion (121a) are formed in said inside and outside surfaces (111b,111a) of each of the deformed portions of said substrate, respectively;
a covering layer forming step of forming a covering layer (115;131) on said inside surface and an inner surface of said recess (121b);
a surface smoothing step of smoothing said outside surface, so that said protrusion formed in said outside surface of each of the deformed portions of said substrate is eliminated whereby said recess formed in said inside surface of each of the deformed portions of said substrate converts into a corresponding one of said nozzle holes (113); and
a non-wetting-layer forming step of forming said non-wetting layer (117) on said outside surface in a plating operation.