发明名称 Semiconductor device having a plurality of semiconductor chips and method for manufacturing the same
摘要 A semiconductor device includes a first semiconductor chip ( 5 ) having a first terminal ( 7 ) on one surface, a second semiconductor chip ( 1 a) which is larger than the first semiconductor chip ( 5 ) and on which the first semiconductor chip ( 5 ) is stacked and which has a second terminal ( 3 ) on one surface, an insulating layer ( 10 ) formed on a second semiconductor chip ( 1 a) to cover the first semiconductor chip ( 5 ), a plurality of holes ( 10 a) formed in the insulating layer ( 10 ) on at least a peripheral area of the first semiconductor chip ( 5 ), a via ( 11 a) formed like a film on inner peripheral surfaces and bottom surfaces of the holes ( 10 a) and connected electrically to the second terminal ( 3 ) of the second semiconductor chip ( 1 a), a wiring pattern ( 11 b) formed on an upper surface of the insulating layer ( 10 ), and an external terminal ( 14 ) formed on the wiring pattern ( 11 b).
申请公布号 US2006246623(A1) 申请公布日期 2006.11.02
申请号 US20060477550 申请日期 2006.06.30
申请人 FUJITSU LIMITED 发明人 MATSUKI HIROHISA;AIBA YOSHITAKA;SATO MITSUTAKA;OKAMATO TADAHIRO
分类号 H01L21/00;H01L21/60;H01L23/12;H01L23/31;H01L23/538;H01L25/04;H01L25/065 主分类号 H01L21/00
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