METHOD FOR ARRANGED VAPOR DEPOSITION OF METAL NANOPARTICLE AND METHOD FOR GROWING CARBON NANOTUBE USING METAL NANOPARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a method for arranged vapor deposition of metal nanoparticles and a method for growing carbon nanotubes using metal nanoparticles, wherein metal nanoparticles having no inclusion of impurities are placed in a uniform particle size at a desired position.

SOLUTION: The method includes at least the steps of: irradiating a metal target with laser light in a carrier gas atmosphere to produce plasma by laser vaporization of the metal target material and then cooling by the carrier gas to grow metal nanoparticles 9; introducing the produced metal nanoparticles 9 into a differential electromobility particle diameter sorting device 4 to sort metal nanoparticles 9 with a specified particle diameter by using the difference in particle mobility; vapor depositing the sorted metal nanoparticles 9 on a substrate provided with a mask 2 having an opening pattern 3 of a predetermined shape; and removing the metal nanoparticles 9 deposited on the mask 2 together with the mask 2.

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