| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-frequency generator for accurately controlling its frequency and phase. <P>SOLUTION: The high-frequency generators 14a, 14b for accurately controlling frequency and phase include power sources 222a and 222b, sensors 224a and 224b, and sensor signal processing units 226a and 226b. The sensor signal processing units 226a and 226b are connected with the power sources 222a and 222b and sensors 224a and 224b for controlling the phase and/or frequency of the high-frequency generators 14a and 14b. <P>COPYRIGHT: (C)2007,JPO&INPIT |
