摘要 |
PROBLEM TO BE SOLVED: To provide an organic light-emitting display of a single crystalline silicon thin-film transistor, and to provide a method of fabricating the same. SOLUTION: The organic light-emitting display is provided, where a semiconductor circuit unit of 2T-1C structure, including a switching transistor and a drive transistor formed of single crystalline silicon is formed on a plastic substrate. The method of manufacturing the single-crystal silicon includes forming a single crystalline silicon layer and a buffer layer on a crystal grown plate, and then forming a partition layer at a predetermined depth in the single-crystal silicon layer, by implanting hydrogen ions from an upper portion of an insulating layer. The single-crystal silicon layer is stuck to the substrate. The partition layer is divided by heat energy applied to the outside. Consequently, the single-crystal silicon film can be formed on the substrate into a designated thickness. COPYRIGHT: (C)2007,JPO&INPIT
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