| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate measuring element and a micro flow passage device excellent in mechanical strength. SOLUTION: The flow rate measuring element 10 comprises: the micro flow passage 9 in which the liquid (a) and a tracer (b) contained in the liquid (a); the optical waveguide 15 optically coupled with the first part 11 of the micro flow passage 9; the optical waveguide 17 optically coupled with the second part 13 positioning at the lower stream than the first part 11; the optical waveguide 19 optically coupled with the optical optical waveguide 15 through the first part 11; the optical waveguide 21 optically coupled with the optical waveguide 17 through the second part 13; the light source 23 optically coupled with the optical waveguide 15 and the optical waveguide 17; and the optical detection part 26 optically coupled with the optical waveguide 19 and the optical waveguide 21. Wherein, the micro flow passage 9, optical waveguide 15, the optical waveguide 17, the optical waveguide 19, and the optical waveguide 21 are provided on the substrate 29. COPYRIGHT: (C)2007,JPO&INPIT
|
