APPARATUS AND PROCESS FOR STORAGE AND DISPENSING OF CHEMICAL REAGENTS AND COMPOSITIONS

摘要

A fluid storage and dispensing package, including a rigid overpack defining an interior volume, a liner disposed in the interior volume of the overpack to hold liquid medium, and a positional fixation structure arranged to restrain movement of the liner when holding liquid medium, wherein the positional fixation structure is not in contact with liquid medium when liquid medium is contained in the liner. Such package, and associated packaging method, preferably involves zero-headspace containment of the liquid or liquid-containing material, and is particularly advantageous in application to storage and dispensing of film-forming colloidal silica-based chemical mechanical polishing (CMP) compositions, with respect to suppressing the presence of microbubbles and unwanted particles.