发明名称 METHOD FOR PRODUCING METALLIC BIT LINE CONTACTS
摘要 A memory cell and method of forming the same is provided. To make contact between a bit line and a select transistor of a dynamic memory unit on a semiconductor wafer, a contact hole is filled with a metal or a metal alloy. A liner layer may be introduced between the semiconductor substrate and the metal filling. The semiconductor substrate has a doped region in the contact hole.
申请公布号 KR100641934(B1) 申请公布日期 2006.11.02
申请号 KR20037013869 申请日期 2003.10.23
申请人 发明人
分类号 H01L21/8242 主分类号 H01L21/8242
代理机构 代理人
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