| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a position measuring device minimizing a measurement error depending on a wavelength. <P>SOLUTION: This position measuring device has: an illumination optical system 1 for irradiating a specimen 15 with illumination light; an imaging optical system 2 for imaging an image of the specimen on an imaging device 25; and an image processing device 3 for processing a signal from the imaging device. The position measuring device also has: exclusive illumination optical systems 1R, 1G, 1B for each light in narrow wavelength bands for illuminating the specimen in a telecentric way with each light in the plurality of narrow wavelength bands; and exclusive imaging optical systems 2R, 2G, 2B for each light in narrow wavelength bands for imaging in the telecentric way each light in the plurality of narrow wavelength bands from the specimen, and also has: an illumination optical system selection means 27 for selecting the exclusive illumination optical system; and an imaging optical system selection means 26 for selecting the exclusive imaging optical system. <P>COPYRIGHT: (C)2007,JPO&INPIT |
