| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device of which change of a gain of an operation amplifier of a control circuit is made small by reducing influence of change of environmental temperature. SOLUTION: The amplifying circuit provided to a control means has a resistor body integrated by electrically connecting a first resistor of which rate of change in resistance in a prescribed range of temperature has a first hyperbolic characteristics in positive value direction, and a second resistor of which rate of change in resistance to the temperature has hyperbolic characteristics in negative value direction which is reversed to the first characteristics, and reduces amount of the shift of light axis by an operation amplification. By the above, the gain of the operation amplifier changes in accordance with the change of environmental temperature, and fluctuation of output against the input of the circuit board, on which a plurality of operation amplifier is mounted, is avoided. Further, the output against the input is turned into high precision by mounting the circuit board on the charged particle beam device. COPYRIGHT: (C)2007,JPO&INPIT
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