| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrogen sensor capable of enhancing the hydrogen absorbing capacity of a hydrogen absorber to stepwise or continuously detect the concentration of hydrogen in an atmosphere. SOLUTION: The hydrogen sensor is constituted of an insulating substrate 1, the laminar semiconductor 2 formed on the almost whole upper surface of the insulating substrate 1, the hydrogen absorber 3 formed on the central part of the surface of the semiconductor 2, the inside electrodes 5 and 5 formed on the surface of the semiconductor 2 on both left and right sides of the hydrogen absorber 3 and the outside electrodes 6 and 6 formed on the surface of the semiconductor 2 on the outsides of the inside electrodes 5 and 5. The hydrogen absorber 3 is formed of gold or a gold/palladium alloy based on gold. COPYRIGHT: (C)2007,JPO&INPIT
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