| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for inspection and capable of speedily creating temperature conditions of high and low temperatures, improving inspection efficiency, and improving inspection accuracy of temperature characteristics inspection. SOLUTION: In the method for inspecting the temperature characteristics of a workpiece to be inspected, a cooled-temperature area; a cooling measurement part 41 for transferring heat corresponding to a heated-temperature area; and heating measurement parts 42 and 43 are prepared for the object to be inspected. Control is performed at the heating measurement part in such a way that temperature of the heating measurement part may approximately linear change with the workpiece 50 in contact with the heating measurement part. The temperature characteristics of the workpiece are inspected in a temperature region in which the temperature of the heating measurement part approximately linearly changes. COPYRIGHT: (C)2007,JPO&INPIT
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