发明名称 Thin film transistor and method of fabricating the same
摘要 A thin film transistor (TFT) and a method of fabricating the same, in which a fabrication process is simplified and damage to a gate insulating layer is decreased. The method of fabricating the TFT includes forming at least one buffer layer on a substrate, forming a first semiconductor layer formed on the buffer layer and a second semiconductor layer by depositing a semiconductor doped with a dopant on the first semiconductor layer, patterning the second semiconductor layer to form source and drain regions, forming a gate insulating layer on the source and drain regions, and forming a gate electrode on the gate insulating layer.
申请公布号 US2006246639(A1) 申请公布日期 2006.11.02
申请号 US20060361727 申请日期 2006.02.23
申请人 CHOI DAE C;CHOI BYOUNG D;IM CHOONG Y 发明人 CHOI DAE C.;CHOI BYOUNG D.;IM CHOONG Y.
分类号 H01L21/84 主分类号 H01L21/84
代理机构 代理人
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