摘要 |
<P>PROBLEM TO BE SOLVED: To attach and fix an optical element highly precisely to an accurate attachment position with an accurate tilt angle without using an auxiliary part and a fixing tool when the optical element (half mirror, grating or the like) is attached to the attachment position. <P>SOLUTION: In a half mirror arrangement part 4, concave grooves 42 are formed at connection parts of a flat plane 40 and a supporting wall part 41 abutted by both ends 320 of a laser beam out-going plane 32 through which the laser beam of a half mirror 3 is passed and the supporting wall part 41 of the flat plane part 40, a tilt part 422 having a fixed tilt angle is formed at an opposite side to the place at which the inside 421 of a side connected to the supporting wall part 41 of the concave groove 42 is formed. <P>COPYRIGHT: (C)2007,JPO&INPIT |