| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which reduces a decrease in piezoelectric characteristics, an inkjet head and their manufacturing methods. <P>SOLUTION: The piezoelectric actuator uses metal nanoparticles which can be sintered at low temperatures as a conductive material to form a lower electrode 3 on a vibrating plate 2. To form a piezoelectric layer 4, an aerosol deposition method which does not require a sintering process (the method of forming a thin film by spraying an aerosol containing material particles and sticking the particles) is used. This composition eliminates the need for sintering under strict conditions for formation of the lower electrode and the piezoelectric layer. In an annealing process after the piezoelectric layer 4 is formed, the sintering of the lower electrode 3 can be simultaneously advanced. Consequently a heat cycle during the manufacturing process can be reduced to a minimum requisite, and delamination and diffusion of a vibrating plate 2 material to the piezoelectric layer 4 due to a heat history can be restrained. Consequently a decline in the piezoelectric characteristics can be restrained. <P>COPYRIGHT: (C)2007,JPO&INPIT |
