| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a washing method for an ultra-pure water production feeding apparatus capable of shortening a washing test operation time that ultra-pure water reaches to a desired quality of water at new starting up of the ultra-pure water production feeding apparatus or at restarting up after rest by periodic inspection or the like and realizing a starting up method suitable for performing work at a field. <P>SOLUTION: At least part of a liquid-contact part of the ultra-pure water production feeding apparatus for treating primary pure water to produce ultra-pure water and feeding it to a usage place is subjected to circulation washing with a basic washing liquid, pushing out of the basic washing liquid by pure water and rinsing are sufficiently performed, circulation and/or immersion washing by a hydrogen peroxide washing liquid is performed and pushing-out of the hydrogen peroxide washing liquid by pure water and rinsing are further performed. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
