| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for allowing diversity of viscosities of samples and comprehensively detecting anomalous suction due to various factors during suction. SOLUTION: The method for verifying the state of suction includes the acquisition of pressure data yi in a suction tube to a suction elapsed time ti in a reference state of suction; the acquisition of pressure data Yi in the suction tube to the suction elapsed time ti in the state of suction of an object to be verified; the acquisition of pressure data yci or Yci acquired by converting either the pressure data yi or Yi by a correction coefficient dependent on the suction elapsed time; the computation of a minimum value of the residual sum of squares ofΣ(Yi-yci)<SP>2</SP>orΣ(yi-Yci)<SP>2</SP>on the basis of Yi and yci or yi and Yci; and the verification of the quality of the state of suction according to results of comparison between the computed minimum value of the residual sum of squares or its square root and a threshold. COPYRIGHT: (C)2007,JPO&INPIT |
