发明名称 TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a transfer apparatus, where the position can be easily detected and maintenance can be facilitated. SOLUTION: The transfer apparatus has two vehicles 31, 20a, 20b having a possibility of interfering with each other, and the vehicle 31 is driven by a motor 49, and has a detection means for detecting the position of the vehicle 31. The detection means is equipped with an absolute encoder 55 which detects the rotation quantity of a rotating shaft 53 of the motor 49, and then outputs the detected signal, a driver 62 which receives the detected signal outputted from the absolute encoder 55, and then outputs a position information, and a controller 63 which distinguishes the position of the vehicle 31 in response to the position information outputted from the driver 62. And the output values from the absolute encoder 55 at the time when the vehicle 31 moves to a predetermined cleaning position A, and an upper position B, are stored in the driver 62 as position date. The controller 63 moves other vehicles 20a, 20b, only when the vehicle 31 resides at a predetermined position. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006303537(A) 申请公布日期 2006.11.02
申请号 JP20060198013 申请日期 2006.07.20
申请人 TOKYO ELECTRON LTD 发明人 KURODA OSAMU;OGAMI KANKO
分类号 H01L21/677;H01L21/304 主分类号 H01L21/677
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