| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint lithography apparatus which is small in size, has a high resolution, and is inexpensive. SOLUTION: The imprint lithography apparatus has a template holder 6 configured to hold an imprint template 1 and a substrate table 3. The template holder 6 has a gas bearing configured to supply gas via a high pressure channel 9, and to control the separation distance between the imprint template 1 and a substrate 2 held on the substrate table 3. COPYRIGHT: (C)2007,JPO&INPIT
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