摘要 |
PROBLEM TO BE SOLVED: To provide a thin film capacitor array capable of changing capacity by a large amount by the application of DC biasing voltage, and of minimizing nonlinear distortions or the like due to high-frequency signals. SOLUTION: In the thin film capacitor array, n pieces of thin film capacitor with m pieces of thin film capacitor laminated and connected in parallel therein are connected in series to form a first to n-th variable capacity forming parts C1-C3, an i-th input terminal side bias line V11 is provided between the input terminal of the first variable capacity forming part C1 and a node between a 2i-th variable capacity forming part C2 and a 2i+1-th variable capacity forming part C3, and an i-th output terminal side bias line V21 is provided between an output terminal of the n-th variable capacity forming part C3 and a node between a 2i-1-th variable capacity forming part C1 and a 2i-th variable capacity forming part C2. The thin film capacitor array is capable of reducing the nonlinear distortions due to high-frequency signals, has an excellent power handling capability, and is capable of changing capacity by a large amount by DC biasing voltage. COPYRIGHT: (C)2007,JPO&INPIT
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