| 摘要 |
PROBLEM TO BE SOLVED: To provide reduced pressure drier which can prevent uneven drying of a substrate by drying it evenly under reduced pressure. SOLUTION: The reduced pressure drier comprises a chamber 10 consisting of a lid 11, a packing 12, and a base 13; support pins 15 set upright on the base 13 of the chamber 10; and a support plate 22 whereon elevation pins 21 are set upright. Below the base 13 of the chamber 10, a cooling water circulation channel 42 is arranged. The cooling water circulation channel 42 is connected to a temperature controller 41, and temperature-controlled cooling water is circulated in the cooling water circulation channel 42. Parts of the cooling water circulation path 42 pass through the base 13 to be brought into contact with the bottoms of the support pins 15. COPYRIGHT: (C)2007,JPO&INPIT
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