| 摘要 |
PROBLEM TO BE SOLVED: To reduce a size, and to reduce a cost, in an SAW pressure sensor for sensing pressure by frequency fluctuation of an SAW element. SOLUTION: This SAW pressure sensor is provided with: a piezoelectric substrate 10 with the SAW element 11 formed on a one-side main face; a case member 1 opened in a ceiling part and having a through hole 3 formed in the central part of an inner bottom part; a bonding member 4 for joining the piezoelectric substrate 10 to the case member 1 to surround the through-hole 3; and a lid body 20 for sealing the ceiling part of the case member 1. An antenna 15 performing transmission and reception with an external sensing device is formed on the piezoelectric substrate 10 in a form of a strip line. COPYRIGHT: (C)2007,JPO&INPIT
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