| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method, which detect an open circuit/short circuit of a conductive pattern. SOLUTION: A tip part of a probe 30 is brought into contact with one end in either one out of the conductive patterns 15a, 15b arrayed regularly, a sensor part 20 having a size astride over a wiring pattern thereof and the adjacent pattern is positioned in a position with a prescribed separate distance from the patterns, and the probe 30 and the sensor part 20 are moved on an inspection objective substrate while synchronized. The short circuit or the like is judged, for example, on the basis of a difference between a detection signal in a usual time and a detection signal in an abnormal time, and a tendency in a level change between the detection signals. COPYRIGHT: (C)2007,JPO&INPIT
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