摘要 |
A plurality of drive sections are defined by forming a plurality of slits in a plate-shaped member. Then, a plurality of piezoelectric layers are formed in the drive sections respectively by depositing particles of a piezoelectric material onto the plate-shaped member. Subsequently, after forming individual electrodes on the piezoelectric layers respectively, the drive sections are bent in a direction orthogonal to a plane direction of the plate-shaped member. Thus, there is provided a method of easily producing a piezoelectric actuator including the drive sections which are bent-shaped and on which the piezoelectric layers are formed respectively.
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