DEPOSITION OF MATERIALS

摘要

A liquid injection system (10) receives a flow of host material in liquid precursor form and forms the liquid flow into a spray, which is delivered by a head (4) in a chamber (3). Nano-particle carrier liquid injector systems (11, 12) receive flows of nano-particles dispersed in liquid carriers, and form the liquid into a spray which is also delivered over the substrate wafer by the spray head (4). The sprayed material forms a deposit on the substrate in the chamber. A UV source (5) is operated so that the deposited material forms a layer on the substrate. The layer comprises nano-particles embedded in the host material.