| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device which improves precision of a plasma treatment of an object and which is stand-alone. <P>SOLUTION: The plasma treatment device has a plasma irradiating unit which irradiates plasma on the surface of an object, a posture control unit 30 controlling a plasma irradiating posture of the plasma irradiating unit, position control units 10, 11, 51 controlling a plasma irradiating position on the surface of the object, a radical measuring unit 41 measuring a radical density irradiated by the plasma irradiating unit, and a first control unit 52 which, in accordance with the radical density measured by the radical measurement unit, controls a plasma generating volume of the plasma irradiating unit. <P>COPYRIGHT: (C)2007,JPO&INPIT |
