PROBE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a probe and its manufacturing method capable of surely contacting with electrodes arranged with a small pitch by making a contactor small while keeping strength. SOLUTION: The probe 10 is constituted such that the beam 11 is formed with support 12 and the column 13 bent in L of flat surface shape, and at the end of the column 13 a contactor 14 is provided, extending toward the same direction as the direction of the column 13. Both the support 12 and the column 13 are formed with e.g. approximately uniform thickness of nickel or nickel alloy of 70-80μm, and the contactor 14 is thinner than the beam 11 of approximately uniform thickness of 10-20μm thick nickel or nickel alloy. The tip of the contactor 14 is formed in a point. COPYRIGHT: (C)2007,JPO&INPIT