发明名称 Reflecting mirror and exposure apparatus using the same
摘要 A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.
申请公布号 US2006245035(A1) 申请公布日期 2006.11.02
申请号 US20060408881 申请日期 2006.04.21
申请人 CANON KABUSHIKI KAISHA 发明人 UCHIDA SHINJI;SAI CHOSHOKU;ASADA KATSUMI;ITO HIROHITO;SAKINO SHIGEO
分类号 G02B26/00 主分类号 G02B26/00
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