发明名称 |
Verwendung von Wasser und angesäuertem Wasser zur Reinigung flüssiger MOCVD Vorläuferverbindungen |
摘要 |
This invention relates to an improvement in a purification process for producing those liquid copper based complexes of beta-diketones and, particularly the monovalent copper complexes of beta-diketones, which are suited for application by chemical vapor deposition in the electronics industry. In the basic process for preparing a copper based complex, a reactive copper compound is reacted with a fluorinated beta-diketonate and an organo source such as an olefinic source or one having acetylenic unsaturation. Purification is effected by contacting reaction product with a double deionized deoxygenated water source and preferably an acid/water source. An aqueous layer and an organic layer are formed with the aqueous layer containing byproducts and the organic phase containing product. |
申请公布号 |
DE60209294(T2) |
申请公布日期 |
2006.11.02 |
申请号 |
DE2002609294T |
申请日期 |
2002.12.27 |
申请人 |
AIR PRODUCTS AND CHEMICALS INC. |
发明人 |
ZORICH, ROBERT SAM;THURMOND, JAMES RICHARD;ROBERTS, DAVID ALLEN |
分类号 |
B01D11/04;C07F1/00;C07C45/77;C07C45/80;C07C45/81;C07C49/92;C07F1/08;C07F7/08 |
主分类号 |
B01D11/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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