DIAMOND SUBSTRATE AND METHOD FOR FABRICATING THE SAME

摘要

A diamond substrate is provided to prevent a diamond layer from being deformed by forming the diamond layer on the upper surface of a SiC layer. A diamond layer(120) is formed on the upper surface of a SiC layer(130) for preventing a diamond layer from being deformed. A semiconductor layer(140) is formed on the lower surface of the SiC layer to eliminate crystalline nonuniformity between the diamond layer and the semiconductor layer. The diamond layer is a material selected from a group composed of a single crystalline diamond layer and a polycrystalline diamond layer.