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发明名称
COMPOSITION AND METHOD FOR POLISHING A SAPPHIRE SURFACE
摘要
申请公布号
CA2599401(A1)
申请公布日期
2006.11.02
申请号
CA20062599401
申请日期
2006.03.02
申请人
CABOT MICROELECTRONICS CORPORATION
发明人
CHERIAN, ISAAC;DESAI, MUKESH;MOEGGENBORG, KEVIN
分类号
C03C15/00;B24B37/04;B44C1/22;H01L21/461
主分类号
C03C15/00
代理机构
代理人
主权项
地址
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