Interferometer Calibration Methods and Apparatus

摘要

A Fabry-Perot (FP) interferometer includes substantially parallel first and second reflecting surfaces spaced apart by an optical gap between the first and second reflecting surfaces. The FP interferometer also has a mechanism for controlling the optical gap. The mechanism includes a plurality of electrostatic control plates. Each electrostatic control plate has a fixed control-plate area. Each control plate is adapted to control the optical gap by application of a control-plate voltage. The control-plate areas are related by integral ratios.