NOVEL RUTHENIUM-BASED MATERIALS AND RUTHENIUM ALLOYS, THEIR USE IN VAPOR DEPOSITION OR ATOMIC LAYER DEPOSITION AND FILMS PRODUCED THEREFROM
摘要
<p>An alloy for use in vapor deposition or atomic layer deposition is described herein that includes ruthenium and at least one element from group IV, V or VI of the Periodic Chart of the Elements or a combination thereof. In addition, a layered material is described herein that comprises at least one layer that includes a ruthenium-based material or ruthenium-based alloy and at least one layer that includes at least one element from group IV, V or VI of the Periodic Chart of the Elements or a combination thereof.</p>
申请公布号
WO2006115476(A2)
申请公布日期
2006.11.02
申请号
WO2005US13663
申请日期
2005.04.21
申请人
HONEYWELL INTERNATIONAL INC.;LEE, EAL;TRUONG, NICOLE;PRATER, ROBERT;MORALES, DIANA