THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF

摘要

A thin film transistor display panel, and a manufacturing method thereof are provided to make a gradient of a sidewall of a contact hole gentle by forming a protrusion at a lower portion of the contact hole where a drain electrode and a pixel electrode contact each other, or by remaining part of an upper layer of a data line layer. A gate line and a protrusion(123) are formed on a substrate(210). A gate insulating layer(140) is formed on the gate line and the protrusion. A semiconductor(151,154) is formed on the gate insulating layer. A data line(171) and a drain electrode(175) are formed on the semiconductor at least in part, and include a lower layer and an upper layer. A passivation layer(180) is formed on the data line and the drain electrode, has a contact hole exposing the lower layer of a part of the drain electrode or the data line and having at least one boundary placed on the protrusion. A conductor is connected to the drain electrode or the data line through the contact hole.