| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate case with which a large sized substrate represented by mask blanks for a liquid crystal is conveyed without getting damaged. <P>SOLUTION: A first case body 1 and a second case main body 2 are joined together so as to form a space in which the substrate 100 is contained in the inside. The substrate 100 is held between a substrate retainer (10) and a substrate fixture 20 and fixed by locking a locking hardware 3 of the first and second case bodies 1, 2. A propulsive screw shaft 23 projected toward the inside of the case in a freely entering and leaving manner, a frontally seen X shaped clamp lever 25 screw combined to the propulsive screw shaft 23, a conveying means 26 to advance the propulsive screw shaft 23 toward the inside of the case, and a substrate holder 27 mounted on a tip of the propulsive screw shaft 23 so as to fix a side face of the substrate, are provided in a first box 21 of the substrate fixture 20. A plurality of substrate retainers (10) and a plurality of substrate fixtures 20 are provided on the first and second case bodies 1, 2. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
