| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing method for an inorganic oxide film in which alcohol can securely and chemically be bonded to not only a surface of the inorganic oxide film, but also an internal surfaces of pores, a substrate for an electronic device such that, for example, aligning properties of liquid crystal molecules etc., are hard to decrease with time, a manufacturing method for the substrate for the electronic device in which the substrate for the electronic device can be manufactured, and a liquid crystal panel and electronic equipment which are reliable. SOLUTION: The manufacturing method for the substrate for the electronic device includes the stages of: forming the inorganic oxide film having a plurality of pores 30 on one surface side of the substrate 9 by an oblique vapor-deposition method; dipping the substrate 9 where the inorganic oxide film 31 is formed in processing liquid containing at least first alcohol and second alcohol having a smaller molecular weight than the first alcohol; making the processing liquid permeate the pores 30 by reducing the pressure in the space where the processing liquid is installed; and obtaining an alignment film 3A by chemically bonding alcohol in the processing liquid to the surface of the inorganic oxide film 31 and internal surfaces of the pores 30. COPYRIGHT: (C)2007,JPO&INPIT |
